| Photoresist is a thick light-sensitive material applied to a wafer in a liquid state in small quantities. The wafer is spun at ± 3000 rpm which spreads the "puddle" into a uniform layer between 1 and 100 µm thick. |
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| Berkshire recommends the following wipers for the Pre-Spin/Spin Processes. |
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Clean resist bottle's thread
Clean outside of resist bottles
Clean spin chuck
Spill control of resist overflow from containment buckets |
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| MicroSeal SuperSorb® |
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2-ply bonded, 100% knitted polyester with ultrasonic heat seal
Laundered and packaged in an ISO 4 (Class 10) cleanroom
Berkshire's most absorbent wiper
High abrasion resistance, works well with IPA, acetone and other solvents |
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| MicroSeal®-VP |
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100% continuous filament knit polyester with ultrasonic sealed edges
Laundered and packaged in an ISO 4 (Class 10) cleanroom
Smooth surface with excellent loft and hand characteristics
High abrasion resistance, works well with IPA, acetone and other solvents |
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| ValuSeal-HA® |
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100% knitted polyester with ultrasonic heat seal
Laundered and packaged in an ISO 4 (Class 10) cleanroom
Critically low particles and fibers
Works well with IPA, acetone and other solvents |
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| Super Polx® 1200 |
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100% continuous filament knitted polyester
Absorbs three times its weight
Engineered low ion and chemical resistant; pure
No binders or surfactants |
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| ValuSeal®-LP |
| 100% knitted polyester with sealed edge
Laundered and packaged in Berkshire's ISO 4 (Class 10) cleanroom
Lowest Non Volatile Residues available
Steam autoclavable for aseptic environment
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| Berkshire recommends the following wipers for the Post Spin/Soft Bake Processes. |
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Removal of edge beads
Work surface
Clean spin chuck surface
When removing spin bowl from station, place a wiper under the exhaust opening so no resist is dropped on the floor
Wipe down spin bowl retaining ring |
|
| MicroSeal SuperSorb® |
|
2-ply bonded, 100% knitted polyester with ultrasonic heat seal
Laundered and packaged in an ISO 4 (Class 10) cleanroom
Berkshire's most absorbent wiper
High abrasion resistance, works well with IPA, acetone and other solvents |
| |
| ValuSeal-HA® |
|
100% knitted polyester with ultrasonic heat seal
Laundered and packaged in an ISO 4 (Class 10) cleanroom
Critically low particles and fibers
Works well with IPA, acetone and other solvents |
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| Durx® 670 |
| Hydroentangled 55% cellulose/45% polyester
Smooth, highly absorbent and durable
Works well with IPA and other solvents |
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| MicroSeal® 1200 |
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100% knit polyester with sealed edge
Laundered and packed in an ISO Class 4 (Class 10) cleanroom
Critically low particles and fibers, lowest extractables and ions |
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| Super Polx® 1200 |
|
100% continuous filament knitted polyester
Absorbs three times its weight
Engineered low ion and chemical resistant; pure
No binders or surfactants |
